The 62nd JSAP Spring Meeting, 2015

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3 Optics and Photonics » 3.7 Laser processing

[13a-A11-1~11] 3.7 Laser processing

Fri. Mar 13, 2015 9:30 AM - 12:30 PM A11 (6A-116)

11:15 AM - 11:30 AM

[13a-A11-7] Formation of porous SiO2 films by pulsed-laser deposition using F2 laser

〇Daichi Taniyama1, Hiroshi Ikenoue1, Tomoyuki Ohkubo1, Daisuke Nakamura1, Tatsuo Okada1 (1.kyushu Univ.)

Keywords:low-k film,pulsed laser deposition,F2 laser