[13a-A21-1~13] 6.1 強誘電体薄膜

▲ [13a-A21-8] Development of 400°C operational relaxor ferroelectric based thin-film capacitor with exceptionally high stability

〇Kumaragurubaran Somu¹, Takahiro Nagata¹, Kenichiro Takahashi^{1, 2}, Sung-Gi Ri^{1, 2}, Yoshifumi Tsunekawa^{1, 2}, Setsu Suzuki^{1, 2}, Toyohiro Chikyow¹ (1.NIMS, 2.COMET Inc.)

キーワード：Relaxor,Ferroelectric,Thinfilms