The 62nd JSAP Spring Meeting, 2015

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13 Semiconductors » 13.5 Semiconductor devices and related techologies

[13a-A23-1~10] 13.5 Semiconductor devices and related techologies

Fri. Mar 13, 2015 9:00 AM - 12:30 PM A23 (6A-216)

10:00 AM - 10:15 AM

[13a-A23-5] Preliminary study on antenna-coupled bolometer utilizing SOI MOSFET

〇(M1)Takeo Ueta2, Yuya Suzuki2, Hiroaki Satoh1, 2, Ajay Tiwari1, Norihisa Hiromoto2, Hiroshi Inokawa1, 2 (1.RIE, Shizuoka Univ., 2.GSE, Shizuoka Univ.)

Keywords:semiconductor,SOI processes and Devoce,THz