The 62nd JSAP Spring Meeting, 2015

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Oral presentation

13 Semiconductors » 13.5 Semiconductor devices and related techologies

[13a-A23-1~10] 13.5 Semiconductor devices and related techologies

Fri. Mar 13, 2015 9:00 AM - 12:30 PM A23 (6A-216)

12:00 PM - 12:15 PM

[13a-A23-9] [Silicon Technology Division Award Speech] Development of polycrystalline GeSn films --Aiming for 3D-IC--

〇Masashi Kurosawa1, 2, Hiroshi Ikenoue3, Noriyuki Taoka1, Osamu Nakatsuka1, Shigeaki Zaima1, 4 (1.Nagoya Univ., 2.JSPS, 3.Kyushu Univ., 4.ESI, Nagoya Univ.)

Keywords:GeSn