[13a-A24-1~13] 13.3 絶縁膜技術

▲ [13a-A24-1] Passivation of silicon surfaces by heat treatment in liquid water at 110^oC

〇Tomohiko Nakamura¹, Toshiyuki Sameshima¹, Masahiko Hasumi¹, Tomohisa Mizuno² (1.TUAT, 2.Kanagawa Univ.)

キーワード：silicon,passivation,MIS type solar cell