[13a-A25-1~13] 13.2 Exploratory Materials, Physical Properties, Devices

[13a-A25-13] Effect of Annealing on Structural Properties of Silicon Implanted by Xenon-ion II

〇Atsushi Kitagawa¹, Shiori Fujita¹, Hitoe Habuchi¹, Tamio Iida¹, Fumitaka Ohashi², Takayuki Ban², Tetsuji Kume², Shuichi Nonomura² (1.Gifu Natl. Coll. Technol, 2.Gifu Univ.)

Keywords:Si clathrate,Xe ion implantation