[13a-A25-1~13] 13.2 Exploratory Materials, Physical Properties, Devices

[13a-A25-9] Formation of amorphous Si/β-FeSi₂ composite thin films by co-sputtering

〇(M1)masashi sawata¹, masahiro nakazawa¹, hiroshi katsumata¹ (1.Meiji Univ.)

Keywords:beta-FeSi2,amorphous Si,sputtering