Dissociation process of CH<sub>4</sub> and SiH<sub>4</sub>

Presentation information

Oral presentation

8 Plasma Electronics » 8.3 deposition of thin film and surface treatment

Fri. Mar 13, 2015 9:00 AM - 12:30 PM A27 (6A-202)

11:45 AM - 12:00 PM

〇Toshio Hayashi¹, Kenji Ishikawa¹, Makoto Sekine¹, Masaru Hori¹ (1.Nagoya Univ.)

Keywords:semiconductor,Solar cell,LCD