Color change of the plasma indicator by Ar/O<sub>2</sub> plasma

Presentation information

Oral presentation

8 Plasma Electronics » 8.3 deposition of thin film and surface treatment

Fri. Mar 13, 2015 9:00 AM - 12:30 PM A27 (6A-202)

12:15 PM - 12:30 PM

〇Hirokazu Miyazaki¹, Keita Hishikawa¹, Yu Yamakawa¹, Kazuhiro Uneyama¹, Hiroshi Inoue¹ (1.SAKURA COLOR PROD.)

Keywords:Ar/O2 plasma,plasma indicator,plasma diagnosis