[13a-A27-1~13] 8.3 deposition of thin film and surface treatment

[13a-A27-4] Behavior of excitated Ar atoms in DC magnetron sputtering plasma using carbon target

〇(M1)yusuke sago¹, takayuki ohta¹, akinori oda², hiroyuki kousaka³ (1.Meijo Univ., 2.Chiba Inst. Technol., 3.Nagoya Univ.)

Keywords:Diamond-Like-Carbon,sputtering,absorption spectroscopy