The 62nd JSAP Spring Meeting, 2015

Presentation information

Print

Oral presentation

15 Crystal Engineering » 15.4 III-V-group nitride crystals

[13a-B1-1~17] 15.4 III-V-group nitride crystals

Fri. Mar 13, 2015 8:30 AM - 1:00 PM B1 (6B-101)

9:30 AM - 9:45 AM

▲ [13a-B1-5] Nitrogen Excess Pressure Annealing of Gallium Nitride using a Novel Heat-Beam Method

〇(M1)NADIA NURSYAFIQAH1, YUJI AWANO1 (1.KEIO UNIV.)

Keywords:Gallium Nitride HEMT,Annealing,Contact resistance