The 62nd JSAP Spring Meeting, 2015

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15 Crystal Engineering » 15.6 Group IV Compound Semiconductors

[13a-B4-1~10] 15.6 Group IV Compound Semiconductors

Fri. Mar 13, 2015 9:00 AM - 11:45 AM B4 (6B-104)

10:00 AM - 10:15 AM

[13a-B4-5] Impact of Remote H2 Plasma on Chemical and Electronic Structures of 4H-SiC Surface

〇TRUYEN NGUYENXUAN1, Akio Ohta2, Daichi Takeuchi1, Hai Zhang1, Katsunori Makihara1, Seiichi MIyazaki1 (1.Nagoya Univ., 2.Nagoya Univ. VBL)

Keywords:4H-SiC