The 62nd JSAP Spring Meeting, 2015

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15 Crystal Engineering » 15.6 Group IV Compound Semiconductors

[13a-B4-1~10] 15.6 Group IV Compound Semiconductors

Fri. Mar 13, 2015 9:00 AM - 11:45 AM B4 (6B-104)

10:30 AM - 10:45 AM

[13a-B4-6] SiO2/SiC structure analysis using X-ray reflectivity

〇Junji Senzaki1, Atsushi Shimozato1, Sadafumi Yoshida1 (1.AIST)

Keywords:silicon carbide,metal-oxide-semiconductor,X-ray reflectivity