[13a-C2-1~8] 16.3 Bulk, thin-film and other silicon-based solar cells

[13a-C2-3] A Demonstration System Based on Laser Terahertz Emission Microsope(LTEM) for a Solar Cell

〇Hidetoshi Nakanishi¹, Minoru Mizubata¹, Akira Ito¹, Iwao Kawayama², HIronaru Murakami², Masayoshi Tonouchi² (1.SCREEN Holdings Co., Ltd., 2.ILE Osaka Univ.)

Keywords:solar cell,terahertz wave,femtosecond laser