The 62nd JSAP Spring Meeting, 2015

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17 Nanocarbon Technology » 17.3 Exploration of new functions and evaluation of basic properties

[13a-D8-1~11] 17.3 Exploration of new functions and evaluation of basic properties

Fri. Mar 13, 2015 9:00 AM - 11:45 AM D8 (16-303)

10:15 AM - 10:30 AM

△ [13a-D8-6] Capacitance improvement by high-pressure O2 annealing of buffer layer in ALD-Y2O3/graphene stack

〇Nobuaki Takahashi1, Kosuke Nagashio1, 2 (1.Univ. of Tokyo, 2.PRESTO-JST)

Keywords:atomic layer deposition