[13a-P13-1~27] 12.1 Fabrications and Structure Controls

[13a-P13-3] Fabrication and characterization of deposited films using different paraffinic materials

〇Keita Sato¹, Kuniaki Tanaka¹, Hiroaki Usui¹ (1.Tokyo Univ. Agricul. & Technol.)

Keywords:paraffin,vapor deposition,thin film