The 62nd JSAP Spring Meeting, 2015

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Poster presentation

13 Semiconductors » 13.4 Si wafer processing /MEMS/Integration technology

[13a-P14-1~14] 13.4 Si wafer processing /MEMS/Integration technology

Fri. Mar 13, 2015 9:30 AM - 11:30 AM P14 (Gymnasium)

9:30 AM - 11:30 AM

△ [13a-P14-12] Stacked Structures of Pb(Zr,Ti)O3 Thin Films with Photo-Sensitive Polymer

〇Takashi Okubo1 (1.Univ. Hyogo)

Keywords:PZT,flexible structure,MEMS