[13a-P14-1~14] 13.4 Si wafer processing /MEMS/Integration technology

[13a-P14-14] Alignment method for plural circuits on ununiform deformed board by reticle free exposure apparatus

〇Mitsunori Tone¹, Masahiro Nagano², Hiroshi Kubota¹, Masao Yoshioka², Koji Kosaka³ (1.Graduate School of Kumamoto Univ., 2.Kumamoto Univ., 3.TKC Co. Ltd.)

Keywords:Flexible Printed Circuit,Alignment