The 62nd JSAP Spring Meeting, 2015

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13 Semiconductors » 13.4 Si wafer processing /MEMS/Integration technology

[13a-P14-1~14] 13.4 Si wafer processing /MEMS/Integration technology

Fri. Mar 13, 2015 9:30 AM - 11:30 AM P14 (Gymnasium)

9:30 AM - 11:30 AM

[13a-P14-5] CMOS Inverter of CLC LT Poly-Si TFTs with Sputtered HfO2 Gate Dielectric Layer

〇Tatsuya Meguro1, Hara Akito1 (1.Tohoku Gakuin Univ.)

Keywords:TFT,High-k,HfO2