The 62nd JSAP Spring Meeting, 2015

Presentation information

Poster presentation

13 Semiconductors » 13.4 Si wafer processing /MEMS/Integration technology

[13a-P14-1~14] 13.4 Si wafer processing /MEMS/Integration technology

Fri. Mar 13, 2015 9:30 AM - 11:30 AM P14 (Gymnasium)

9:30 AM - 11:30 AM

[13a-P14-8] Finite element method simulation of three-terminal graphene NEMS switches

〇(D)Jothiramalingam Kulothungan1, Manoharan Muruganathan1, Hiroshi Mizuta1, 2 (1.JAIST, 2.Univ. of Southampton)

Keywords:NEMS,Graphene,Finite Element Method