Development of Cryogenic Deformable Mirror for Space Infrared Telescopes

Presentation information

Poster presentation

13 Semiconductors » 13.4 Si wafer processing /MEMS/Integration technology

Fri. Mar 13, 2015 9:30 AM - 11:30 AM P14 (Gymnasium)

9:30 AM - 11:30 AM

〇(M1)Aoi Takahashi¹, Keigo Enya¹, Paul Bierden², Steven Cornelissen², Charlie Lam², Michael Feinberg² (1.ISAS/JAXA, 2.BMC)

Keywords:MEMS,deformable mirror,space telescope