[13a-P16-1~2] 15.7 Fundamentals of epitaxy

[13a-P16-1] Fundamental study on growth α-(AlGa)₂O₃ alloys by mist CVD -A study on growth rate of α-Al₂O₃ compared with α-Ga₂O₃-

〇(B)Mikio Takahashi¹, Takumi Hatakeyama¹, Takeyoshi Onuma^{1, 2}, Tomohiro Yamaguchi¹, Tohru Honda¹ (1.Kogakuin Univ., 2.TNCT)

Keywords:mist CVD