[13a-P16-1~2] 15.7 Fundamentals of epitaxy

[13a-P16-2] Determination mechanism of vertical growth rate by spiral step source in GaAs microchannel epitaxy

〇Yosuke Mizuno¹, Masafumi Tomita¹, Hiroyuki Takakura¹, Muneki Iwakawa¹, Daisuke Kambayasi¹, Takahiro Maruyama¹, Shigeya Naritsuka¹ (1.Meijo Univ.)

Keywords:crystal growth,microchannel epitaxy