The 62nd JSAP Spring Meeting, 2015

Presentation information

Poster presentation

15 Crystal Engineering » 15.8 Crystal evaluation, impurities and crystal defects

[13a-P17-1~2] 15.8 Crystal evaluation, impurities and crystal defects

Fri. Mar 13, 2015 9:30 AM - 11:30 AM P17 (Gymnasium)

9:30 AM - 11:30 AM

[13a-P17-2] Observation of strain field in Al ion-implanted silicon carbide crystals by X-ray grazing incidence topography and local rocking curve imaging

〇Yumiko Takahashi1, Keiichi Hirano1, Jun-ichi Yoshimura1, Yoshiki Yamashita1, Takayoshi Shimura2, Shinji Nagamachi3 (1.KEK-PF, 2.Osaka Univ., 3.Nagamachi Science Laboratory Co., Ltd.)

Keywords:topography,rocking curve,SiC