Characterization of corundum-type In<sub>2</sub>O<sub>3</sub> thin films fabricated by Mist-CVD

Presentation information

Poster presentation

Joint Session K » Joint Session K （Poster）

Fri. Mar 13, 2015 9:30 AM - 11:30 AM P18 (Gymnasium)

9:30 AM - 11:30 AM

〇(B)Yuta Suwa¹, Toshiyuki Kawaharamura¹, Kazunobu Kojima², Shigefusa Chichibu² (1.Kochi Univ. of Tech., 2.IMRAM-Tohoku Univ.)

Keywords:In2O3,corundum,Mist-CVD