Development of the continuous synthesis apparatus for ZnO transparent conductive film with low sheet resistance for the multi-plasma ion plating

Presentation information

Poster presentation

Joint Session K » Joint Session K （Poster）

Fri. Mar 13, 2015 9:30 AM - 11:30 AM P18 (Gymnasium)

9:30 AM - 11:30 AM

〇Naoyuki Sato¹, Hiroshi Ooki², Kazustugu Neya², Tastushi Sato² (1.Ibaraki University, 2.Biemtron CO., LTD.)

Keywords:transparent conductive film,low sheet resistance,oxygen plasma