[13a-P18-1~22] Joint Session K （Poster）

[13a-P18-6] Development of the continuous synthesis apparatus for ZnO transparent conductive film with low sheet resistance for the multi-plasma ion plating

〇Naoyuki Sato¹, Hiroshi Ooki², Kazustugu Neya², Tastushi Sato² (1.Ibaraki University, 2.Biemtron CO., LTD.)

Keywords:transparent conductive film,low sheet resistance,oxygen plasma