Effect of sputtering power on electrical properties of Al doped ZnO thin films

Presentation information

Poster presentation

Joint Session K » Joint Session K （Poster）

Fri. Mar 13, 2015 9:30 AM - 11:30 AM P18 (Gymnasium)

9:30 AM - 11:30 AM

〇Motonari Shoriki¹, Sota Inoue¹, Hiroki Kikuchi¹, Rei Sugiura¹, Shuhei Funaki¹, Yasuji Yamada¹ (1.Shimane Univ.)

Keywords:Transparent Conductive Oxide,Sputtering method