[13a-P6-1~9] 3.8 Optical measurement, instrumentation, and sensor

[13a-P6-7] Development of μm-OCT with a white light source and application to semiconductor microfabrications

〇Tsuyoshi Nishi¹, Nobuhiko Ozaki¹, Hirotaka Ohsato², Eiichiro Watanabe², Naoki Ikeda², Yoshimasa Sugimoto² (1.Wakayama Univ., 2.National Institute for Materials Science)

Keywords:Optical Coherence Tomography,Semiconductor microfabrications,White Light Source