The 62nd JSAP Spring Meeting, 2015

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15 Crystal Engineering » 15.2 II-VI and related compounds

[13p-A17-1~11] 15.2 II-VI and related compounds

Fri. Mar 13, 2015 4:15 PM - 7:15 PM A17 (6A-207)

7:00 PM - 7:15 PM

[13p-A17-11] Reactive Sputter-Deposition of ZnSnN2 Polycrystalline Thin Films

Tomoyuki Takeuchi1, Xiang Cao1, Fumio Kawamura2, 〇Naoomi Yamada1 (1.Chubu Univ., 2.NIMS)

Keywords:Zn-IV-N2,polycrystalline films,sputtering