The 62nd JSAP Spring Meeting, 2015

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6 Thin Films and Surfaces » 6.1 Ferroelectric thin films

[13p-A21-1~9] 6.1 Ferroelectric thin films

Fri. Mar 13, 2015 4:15 PM - 6:30 PM A21 (6A-213)

4:15 PM - 4:30 PM

[13p-A21-1] Fabrication and evaluation of HfO2-ZrO2 ultrathin films by chemical solution deposition

Chihoko Abe1, Marina Shiokawa1, Takahisa Shiraishi2, Takao Shimizu2, Hiroshi Funakubo2, 〇Hiroshi Uchida1 (1.Sophia Univ., 2.Tokyo Tech.)

Keywords:Ferroelectric,Film,Hafnium oxide