The 62nd JSAP Spring Meeting, 2015

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6 Thin Films and Surfaces » 6.1 Ferroelectric thin films

[13p-A21-1~9] 6.1 Ferroelectric thin films

Fri. Mar 13, 2015 4:15 PM - 6:30 PM A21 (6A-213)

5:30 PM - 5:45 PM

△ [13p-A21-6] Epitaxial Growth of YSZ Buffer Layer on Large Diameter Silicon Substrate by Sputter Deposition for Piezoelectric MEMS

〇Shinsuke Nishizawa1, Shinya Yoshida1, Kiyotaka Wasa2, Shuji Tanaka1 (1.Tohoku Univ., 2.Yokohama City Univ.)

Keywords:Yttria-stabilized zirconia,Epitaxial growth,MEMS