The 62nd JSAP Spring Meeting, 2015

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13 Semiconductors » 13.2 Exploratory Materials, Physical Properties, Devices

[13p-A25-1~12] 13.2 Exploratory Materials, Physical Properties, Devices

Fri. Mar 13, 2015 4:15 PM - 7:15 PM A25 (6A-218)

5:45 PM - 6:00 PM

[13p-A25-7] Delta doping of Bi into Si crystal with using the Bi nanoline as a dopant source: Carrier transport characterization

〇Kazushi Miki1, 2, Takashi Kanazawa1, 2, Koichi Murata1, 2, Koh'ichi Nittoh1 (1.NIMS, 2.Univ. of Tsukuba)

Keywords:silicon,doping,Bi