The 62nd JSAP Spring Meeting, 2015

Presentation information

Print

Oral presentation

8 Plasma Electronics » 8.5 nanotechnology.

[13p-A27-1~9] 8.5 nanotechnology.

Fri. Mar 13, 2015 4:30 PM - 6:45 PM A27 (6A-202)

5:15 PM - 5:30 PM

[13p-A27-4] Hexagonal BN atomic layer formation with plasma chemical transport

〇Takeshi Kitajima1, Toshiki Nakano1 (1.Nat.Defense.Acad.)

Keywords:h-BN,atomic layer