The 62nd JSAP Spring Meeting, 2015

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Oral presentation

8 Plasma Electronics » 8.5 nanotechnology.

[13p-A27-1~9] 8.5 nanotechnology.

Fri. Mar 13, 2015 4:30 PM - 6:45 PM A27 (6A-202)

5:30 PM - 5:45 PM

[13p-A27-5] Fabrication of graphene-based films using remote plasma

〇Masakazu Tomatsu1, Mineo Hiramatsu1, Hiroki Kondo2, Hori Masaru2 (1.Meijo Univ., 2.Nagoya Univ.)

Keywords:Plasma CVD, Graphene