6:00 PM - 6:15 PM
△ [13p-A28-7] Optimization of Cylindrical Cavity Excitation for Large-Area Microwave Plasma Generation II
Keywords:Microwave Plasma,Cylindrical Cavity
Oral presentation
8 Plasma Electronics » 8.1 Plasma production and control
Fri. Mar 13, 2015 4:30 PM - 7:00 PM A28 (6A-203)
6:00 PM - 6:15 PM
Keywords:Microwave Plasma,Cylindrical Cavity