The 62nd JSAP Spring Meeting, 2015

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Joint Session K » Joint Session K

[13p-D1-1~11] Joint Session K

Fri. Mar 13, 2015 4:15 PM - 7:15 PM D1 (16-101)

5:15 PM - 5:30 PM

[13p-D1-5] Homoepitaxial growth of (-201)β -Ga2O3 films by atmospheric pressure plasma enhanced CVD

〇Takuya Kiguchi1, Yukinori Nose1, Tuyoshi Uehara2, Norifumi Fujimura1 (1.Osaka Prefecture Univ., 2.Sekisui Integrated Research Inc.)

Keywords:Ga2O3