The 62nd JSAP Spring Meeting, 2015

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6 Thin Films and Surfaces » 6.3 Oxide electronics

[13p-D10-1~10] 6.3 Oxide electronics

Fri. Mar 13, 2015 4:30 PM - 7:00 PM D10 (16-305)

6:15 PM - 6:30 PM

[13p-D10-8] Crystal anisotropic etching of MgO substrates using H3PO4 solution

〇(M2)Shota Yamasaki1, Teruo Kanki1, Pellegrino Luca2, Manca Nicola2, 3, Marre Daniele2, 3, Hidekazu Tanaka1 (1.ISIR, 2.CNR-SPIN, 3.Genova Univ.)

Keywords:anisotropic etching,MgO,MEMS