6:15 PM - 6:30 PM
[13p-D10-8] Crystal anisotropic etching of MgO substrates using H3PO4 solution
Keywords:anisotropic etching,MgO,MEMS
Oral presentation
6 Thin Films and Surfaces » 6.3 Oxide electronics
Fri. Mar 13, 2015 4:30 PM - 7:00 PM D10 (16-305)
6:15 PM - 6:30 PM
Keywords:anisotropic etching,MgO,MEMS