The 62nd JSAP Spring Meeting, 2015

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15 Crystal Engineering » 15.3 III-V-group epitaxial crystals

[13p-D4-1~11] 15.3 III-V-group epitaxial crystals

Fri. Mar 13, 2015 4:15 PM - 7:00 PM D4 (16-204)

6:30 PM - 6:45 PM

[13p-D4-10] Optimization of thermal cleaning process for GaSb substrate

〇Haruki Yokoyama1, 3, Takuya Hoshi1, 3, Hiroki Sugiyama1, 3, Koichi Nishi2, 3, Mitsuru Takenaka2, 3, Shinichi Takagi2, 3 (1.NTT, 2.The Univ. of Tokyo, 3.JST CREST)

Keywords:GaSb,MOCVD,thermal cleaning