[13p-D4-1~11] 15.3 III-V-group epitaxial crystals

[13p-D4-3] Rapid thermal annealing of epitaxial two-dimensional nitrogen atomic sheet in GaAs

〇Yukihiro Harada¹, Yasuhiro Ogawa¹, Takeshi Baba¹, Toshiyuki Kaizu¹, Takashi Kita¹ (1.Kobe Univ.)

Keywords:two-dimensional atomic layer,nitrogen delta-doping