The 62nd JSAP Spring Meeting, 2015

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13 Semiconductors » 13.8 Compound and power electron devices and process technology

[13p-P17-1~24] 13.8 Compound and power electron devices and process technology

Fri. Mar 13, 2015 4:30 PM - 6:30 PM P17 (Gymnasium)

4:30 PM - 6:30 PM

[13p-P17-18] Process Dependence of Al2O3/InAlN Interface Properties

〇Masahito Chiba1, Masamichi Akazawa1 (1.Hokkaido Univ. RCIQE)

Keywords:InAlN,Al2O3