The 62nd JSAP Spring Meeting, 2015

Presentation information

Poster presentation

6 Thin Films and Surfaces » 6.4 Thin films and New materials

[13p-P6-1~6] 6.4 Thin films and New materials

Fri. Mar 13, 2015 4:30 PM - 6:30 PM P6 (Gymnasium)

4:30 PM - 6:30 PM

[13p-P6-2] Comprehensive study about ZnO film growth on (001) Si substrate by rf-sputtering

〇Dongcheol Oh1, Kangbok Kim1, Sooman Lee1 (1.Defense Sci. & Tech. Hoseo University)

Keywords:ZnO,rf-sputtering