The 62nd JSAP Spring Meeting, 2015

Presentation information

Print

Poster presentation

6 Thin Films and Surfaces » 6.4 Thin films and New materials

[13p-P6-1~6] 6.4 Thin films and New materials

Fri. Mar 13, 2015 4:30 PM - 6:30 PM P6 (Gymnasium)

4:30 PM - 6:30 PM

[13p-P6-6] Synthesis of Y2O3 films with quick thermal cycling resistance with metal–EDTA complex

Ayumu Toyama1, Tomoyuki Shirai1, Akinori Satoh1, D.Y. Xin1, 〇Keiji Komatsu1, Atsushi Nakamura1, 2, Ikumi Toda1, Shigeo Ohshio1, Hiroyuki Muramatsu1, Hidetoshi Saitoh1 (1.Nagaoka Univ. Tech., 2.ChubuChelest Co.,Ltd.)

Keywords:metal-EDTA complex,Y2O3,quick thermal cycling resistance