The 62nd JSAP Spring Meeting, 2015

Presentation information

Poster presentation

7 Beam Technology and Nanofabrication » 7.4 Buried interface sciences with quantum beam

[13p-P8-1~5] 7.4 Buried interface sciences with quantum beam

Fri. Mar 13, 2015 4:30 PM - 6:30 PM P8 (Gymnasium)

4:30 PM - 6:30 PM

[13p-P8-1] Improvement of Quality of Mesoporous Silica Film by High Pressure H2O Vapor Heat Treatment

〇Takayuki Tajiri1, Shogo Seki1, Reina Koga1, Atsushi Kohno1 (1.Fukuoka Univ.)

Keywords:mesoporous silica film,high pressure H2O vapor heat treatment