[14a-A2-1~11] 11.5 Junction and circuit fabrication procresss, digital applications

[14a-A2-11] Fabrication Process for CB-KID and SFQ Monolithic Devices

〇Mutsuo Hidaka¹, Shuichi Nagasawa¹, Shigeyuki Miyajima², Hiroaki Shishido², Akira Shishido³, Takekazu Ishida² (1.AIST, 2.Osaka Pref. Univ., 3.Nagoya Univ.)

Keywords:superconductor,detector,SFQ circuit