The 62nd JSAP Spring Meeting, 2015

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Oral presentation

6 Thin Films and Surfaces » 6.1 Ferroelectric thin films

[14a-A21-1~11] 6.1 Ferroelectric thin films

Sat. Mar 14, 2015 9:00 AM - 12:00 PM A21 (6A-213)

9:45 AM - 10:00 AM

[14a-A21-4] Analysis of the vibration mode of the Piezoelectric MEMS Vibration Energy Harvesters with Multi-beam Structure

〇Kento Kariya1, Takeshi Yoshimura1, Shuichi Murakami2, Norifumi Fujimura1 (1.Osaka Pref. Univ., 2.TRI-Osaka)

Keywords:energy harvester,BiFeO3,MEMS