10:00 AM - 10:15 AM
[14a-A28-5] Analysis of Target Erosion Profile in Rectangular Magnetron Sputtering Cathode by Three Dimensional Particle-in-Cell Monte Carlo Method
Keywords:3D PIC/MC,Magnetron Sputtering,Target Erosion Profile
Oral presentation
8 Plasma Electronics » 8.1 Plasma production and control
Sat. Mar 14, 2015 9:00 AM - 11:45 AM A28 (6A-203)
10:00 AM - 10:15 AM
Keywords:3D PIC/MC,Magnetron Sputtering,Target Erosion Profile