[14a-C1-1~11] 7.6 Ion beams

[14a-C1-11] Operando measurement of the electrical potential distribution of laminated ceramic capacitors with applied voltage using scanning helium ion microscope

〇Chikako Sakai¹, Nobuyuki Ishida¹, Hideki Masuda¹, Shoko Nagano¹, Daisuke Fujita¹ (1.NIMS)

Keywords:helium ion microscope