The 62nd JSAP Spring Meeting, 2015

Presentation information

Print

Oral presentation

7 Beam Technology and Nanofabrication » 7.6 Ion beams

[14a-C1-1~11] 7.6 Ion beams

Sat. Mar 14, 2015 9:00 AM - 12:00 PM C1 (6C-104)

9:15 AM - 9:30 AM

[14a-C1-2] Development of a cluster ion source using high power impulse magnetron sputtering

〇(M1)Isamu Mizuuchi1, Kengo Akimoto1, Hiroaki Yamamoto2, Masahide Tona2, Keizo Tsukamoto1, 2, Motoyoshi Nakano1, Keijiro Ohshimo1, Fuminori Misaizu1 (1.Tohoku Univ, 2.ayabo corp)

Keywords:HIPIMS,cluster,time of flight mass spectrometry